Integration of DFB lasers with surface-micromachined wavelength-monitoring devices for WDM systems

Shi-sheng Lee; Lih-Yuan Lin; Ming C. Wu

doi:10.1117/12.251261

23 September 1996 Integration of DFB lasers with surface-micromachined wavelength-monitoring devices for WDM systems

Shi-sheng Lee, Lih-Yuan Lin, Ming C. Wu

Proceedings Volume 2881, Microelectronic Structures and MEMS for Optical Processing II; (1996) https://doi.org/10.1117/12.251261
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

A novel precision wavelength monitor comprising 3D microlenses and rotatable gratings has been demonstrated on a single chip of Si using free-space micro-optical bench (FSMOB) technique. Batch-fabricated by surface- micromachining, the integrable wavelength monitor is potentially low cost, light weight, and small volume, and can be directly incorporated into the packages of active semiconductor optoelectronic sources and detectors. All the micro-optical elements on the FSMOB have been `pre-aligned' during the layout of the photomasks. A 1.3 micrometers distributed feedback (DFB) laser has been integrated with this micro- wavelength-meter on the Si substrate using a self-aligned hybrid-integration scheme. A laser-power-independent linear response has been obtained over the entire thermal tuning range of the DFB laser (1.2 nm). The wavelength reading can potentially by fed back to control and stabilize the wavelength of the DFB laser for wavelength-division multiplexed optical communication systems. It is also very useful for spectroscopy applications.

Citation Download Citation

Shi-sheng Lee, Lih-Yuan Lin, and Ming C. Wu "Integration of DFB lasers with surface-micromachined wavelength-monitoring devices for WDM systems", Proc. SPIE 2881, Microelectronic Structures and MEMS for Optical Processing II, (23 September 1996); https://doi.org/10.1117/12.251261

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available