High-power excimer laser and application

Jingru Liu; Xiao Yuan; Yugang Gan; Xueqing Zhao; Aiping Yi; Xiaohong Wang; Longhua Wang; Yanming Wei; Aici Qiu; R. F. Sun

doi:10.1117/12.253310

30 September 1996 High-power excimer laser and application

Jingru Liu, Xiao Yuan, Yugang Gan, Xueqing Zhao, Aiping Yi, Xiaohong Wang, Longhua Wang, Yanming Wei, Aici Qiu, R. F. Sun

Author Affiliations +

Proceedings Volume 2889, High-Power Lasers: Solid State, Gas, Excimer, and Other Advanced Lasers; (1996) https://doi.org/10.1117/12.253310
Event: Photonics China '96, 1996, Beijing, China

Abstract

A high power XeCl and KrF excimer lasers pumped by an intense relativistic electron beam have been developed. The pump power density ranges between 1.5 to 2.0 MW/cm³. The maximum output energy of 136 J with the peak power of 1.5 GW is obtained for the XeCl laser. In KrF laser case, the maximum output energy is 157 J and the peak power 2.0 GW. The UV laser interaction with some materials has been studied by this excimer laser.

Citation Download Citation

Jingru Liu, Xiao Yuan, Yugang Gan, Xueqing Zhao, Aiping Yi, Xiaohong Wang, Longhua Wang, Yanming Wei, Aici Qiu, and R. F. Sun "High-power excimer laser and application", Proc. SPIE 2889, High-Power Lasers: Solid State, Gas, Excimer, and Other Advanced Lasers, (30 September 1996); https://doi.org/10.1117/12.253310

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