Excimer laser machining of advanced materials

Hans Kurt Toenshoff; Ferdinand von Alvensleben; Peter B. Heekenjann; Guido Willmann

doi:10.1117/12.270088

31 March 1997 Excimer laser machining of advanced materials

Hans Kurt Toenshoff, Ferdinand von Alvensleben, Peter B. Heekenjann, Guido Willmann

Proceedings Volume 2992, Excimer Lasers, Optics, and Applications; (1997) https://doi.org/10.1117/12.270088
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

In this paper examinations concerning the laser assisted precision cutting and material removal of Al₂O₃ based printed boards, structuring of SiC-sealing and bearing rings, and ablation of ferrite ceramics are presented. These investigations were performed with 248 nm excimer laser radiation. The required tolerances of the 2D and 3D geometries are smaller than 2 micrometers . Furthermore, the depth of the heat affected zone should be less than 0,5 micrometers and the crack length not greater than the pore diameter of the ceramics, A specially designed machining station and the necessary processing technology will be presented. Further investigation have dealt with the repair and joining of carbon fiber reinforced plastics. Here again, 248 nm excimer laser radiation was used for selectively ablating the epoxy resin without damaging the fibers. Subsequent material examinations show an increased strength of the repassed samples in comparison to unprocessed material.

Citation Download Citation

Hans Kurt Toenshoff, Ferdinand von Alvensleben, Peter B. Heekenjann, and Guido Willmann "Excimer laser machining of advanced materials", Proc. SPIE 2992, Excimer Lasers, Optics, and Applications, (31 March 1997); https://doi.org/10.1117/12.270088

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