Silicon-on-insulator guided-wave structures for thermo-optic switching applications

Ivo Rendina; Giuseppe Cocorullo; Francesco G. Della Corte

doi:10.1117/12.273853

25 April 1997 Silicon-on-insulator guided-wave structures for thermo-optic switching applications

Ivo Rendina, Giuseppe Cocorullo, Francesco G. Della Corte

Proceedings Volume 3007, Silicon-Based Monolithic and Hybrid Optoelectronic Devices; (1997) https://doi.org/10.1117/12.273853
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

A theoretical study aimed at the optimum design of thermo- optic guided-wave switches realized in silicon-on-oxide technology is reported. The heat transfer processes occurring inside such devices are analyzed by means of a 3D finite element thermal simulator. In particular, in rib waveguiding structures, we demonstrate that the optimum values of the oxide layer thickness and of the outer rib height are a function of the heating pulse power used to drive the device. The theoretical results carried out are consistent with the experiments reported in literature.

Citation Download Citation

Ivo Rendina, Giuseppe Cocorullo, and Francesco G. Della Corte "Silicon-on-insulator guided-wave structures for thermo-optic switching applications", Proc. SPIE 3007, Silicon-Based Monolithic and Hybrid Optoelectronic Devices, (25 April 1997); https://doi.org/10.1117/12.273853

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