Paper
11 April 1997 MOEM systems in Europe
Author Affiliations +
Abstract
This is a brief summary of the talk given at Photonics West, San Jose, on 10 February 1997. The description made hereafter of the strategic problematics in Europe in the domain of microsystems results from a free and extensive reading of the literature made available by the EC programs in particular through EUROPRACTICE and NEXUS. What follows expresses personal views and does not reflect any official position. Most of the information material can be found in the mst news journal edited by VDI/VDE-IT. This talk was an attempt to extract the essentials of what is going on in European Microsystem Technologies (MST) from the numerous programs, projects schemes, and initiatives which have been announced, and to position the Opto-Electro-Mechanical Microsystem sin the MST framework.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Patric R. Salomon and Olivier M. Parriaux "MOEM systems in Europe", Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); https://doi.org/10.1117/12.271403
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KEYWORDS
Microopto electromechanical systems

Microsystems

Silicon

Manufacturing

Integrated optics

Microelectronics

Optics manufacturing

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