Interferometric measurement of refractive index profiles for thin film characterization

Colin J. R. Sheppard

doi:10.1117/12.281190

17 September 1997 Interferometric measurement of refractive index profiles for thin film characterization

Colin J. R. Sheppard

Proceedings Volume 3098, Optical Inspection and Micromeasurements II; (1997) https://doi.org/10.1117/12.281190
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

Laser interferometric methods for measurement of refractive index profiles of thin film structure have been investigated experimentally and by computer simulation. An expression for the axial image, which incorporates multiple reflections and refractive distortion, has been derived. An algorithm for reconstruction of the profile from an axial image has been developed. The limitations of this approach have been investigated. The optical system produces a high-pass filtered reconstruction of the refractive index profile. For the approximation when multiple scattering and refractive distortion can be neglected, the results have been generalized to the problem of measurement of 3D refractive index variations from 3D images.

Citation Download Citation

Colin J. R. Sheppard "Interferometric measurement of refractive index profiles for thin film characterization", Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); https://doi.org/10.1117/12.281190

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available