Microelectromechanical systems (MEMS) and their photonic application

Yuji Uenishi; Koji Akimoto; Shinji Nagaoka

doi:10.1117/12.281182

17 September 1997 Microelectromechanical systems (MEMS) and their photonic application

Yuji Uenishi, Koji Akimoto, Shinji Nagaoka

Proceedings Volume 3098, Optical Inspection and Micromeasurements II; (1997) https://doi.org/10.1117/12.281182
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

THe fabrication of tunable optical devices by using Si free- space micro-optics and Ni micromirrors has demonstrated the applicability of MEMS technologies to photonic devices. Compact, multi-functional, assembly-free, micro-optical systems have been developed by using MEMS technologies to integrate optical devices and micromechanics onto the same wafer. A high aspect-ratio Si plate which works as a beam splitter has been fabricated using Si micromachining. A tunable laser diode with an external Si mirror has been fabricated and shown to have wavelength tunability. A Ni micromirror with comb-drive actuator has been developed and applied it to both a tunable optical filter and a tunable laser diode. Due to the precise motion of the micromirror, accurate optical tunability has been obtained.

Citation Download Citation

Yuji Uenishi, Koji Akimoto, and Shinji Nagaoka "Microelectromechanical systems (MEMS) and their photonic application", Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); https://doi.org/10.1117/12.281182

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