UV-laser machining offers new horizon in diffractive optical elements small-series manufacturing

Jerome Prieur; Francoise Cau; Johannes Wais; Andreas Ostendorf

doi:10.1117/12.281255

24 September 1997 UV-laser machining offers new horizon in diffractive optical elements small-series manufacturing

Jerome Prieur, Francoise Cau, Johannes Wais, Andreas Ostendorf

Proceedings Volume 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications; (1997) https://doi.org/10.1117/12.281255
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

The increasing demand of complex micro-optical products such as Diffractive Optical Elements (DOE) requires the development of new optical material processing micro- techniques especially for small-series production. Diamond turning machining is considered an ideal, mature production tool of DOE in ductile materials but not brittle ones. However, the progress in optical material UV-laser machining is proving to be a good candidate for the micro-structuring of glasses. Thus, by using this emergent UV-laser machining technique, DOE prototypes in C2036 have been made and show promising results.

Citation Download Citation

Jerome Prieur, Francoise Cau, Johannes Wais, and Andreas Ostendorf "UV-laser machining offers new horizon in diffractive optical elements small-series manufacturing", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); https://doi.org/10.1117/12.281255

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