Paper
1 November 1997 Metrology of LIGO Pathfinder optics
Author Affiliations +
Abstract
Metrology procedures for determining the power, astigmatism, low and high spatial frequency variations in the surface profile on flat and curved optical surfaces are described. The procedures are applied to the characterization of optics produced for the Pathfinder program of the laser interferometer gravitational observatory and demonstrate that in the case of low spatial frequency surface errors measured by optical interferometry, measurements to a resolution down to (lambda) /2000 are possible in the measurement of the standard deviation of surface variations.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David I. Farrant, Achim J. Leistner, Bozenko F. Oreb, Mark A. Suchting, and Christopher J. Walsh "Metrology of LIGO Pathfinder optics", Proc. SPIE 3134, Optical Manufacturing and Testing II, (1 November 1997); https://doi.org/10.1117/12.279140
Lens.org Logo
CITATIONS
Cited by 2 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Monochromatic aberrations

Interferometers

Spatial frequencies

LIGO

Metrology

Optical testing

Calibration

Back to Top