Improvement of synchrotron radiation mirrors below the 0.1-arcsec rms slope error limit with the help of a long trace profiler

Heiner Lammert; Friedmar Senf; Marion Berger

doi:10.1117/12.295556

1 November 1997 Improvement of synchrotron radiation mirrors below the 0.1-arcsec rms slope error limit with the help of a long trace profiler

Heiner Lammert, Friedmar Senf, Marion Berger

Author Affiliations +

Proceedings Volume 3152, Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors; (1997) https://doi.org/10.1117/12.295556
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

Traditional optical manufacturing methods employing both conventional and modern interferometric techniques, enable one to measure surface deviations to high accuracy, e.g. up to (lambda) 100 for flats (6 nm P-V). In synchrotron radiation applications the slope error is an important criterion for the quality of optical surfaces. In order to predict the performance of a synchrotron radiation mirror the slope errors of the surface must be known. Up to now, the highest achievable accuracy in the production of synchrotron radiation mirrors and in the measuring methods did not fall significantly below the 0.1 arcsec rms limit (spherical and flat surfaces). A long-trace profiler (LTP) is ideally suited for this task since it directly measures slope deviations with high precision. On the other hand, using an LTP becomes very sensitive to random and systematic errors at the limit of 0.1 arcsec. The main influence is the variation of the surrounding temperature in creating temporal and local temperature gradients at the instrument. At BESSY both temperature and vibrations are monitored at the most sensitive points of the LTP. In 1996 BESSY started a collaboration with a neighboring optical workshop combining traditional manufacturing technology with quasi- in-process high precision LTP measurements. As result of this mutual polishing and LTP measuring process, flat surfaces have been repeatedly produced with slope errors of 0.05 arcsec rms, e.g. 1 nm rms and 3 nm P-V (approximately equals (lambda) /200).

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Heiner Lammert, Friedmar Senf, and Marion Berger "Improvement of synchrotron radiation mirrors below the 0.1-arcsec rms slope error limit with the help of a long trace profiler", Proc. SPIE 3152, Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors, (1 November 1997); https://doi.org/10.1117/12.295556

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