Process and performance optimization of bottom antireflective coatings

Shuji Ding; Ping-Hung Lu; Jianhui Shan; Eleazar Gonzalez; Salem Mehtsun; Sunit S. Dixit; Dinesh N. Khanna

doi:10.1117/12.312480

29 June 1998 Process and performance optimization of bottom antireflective coatings

Shuji Ding, Ping-Hung Lu, Jianhui Shan, Eleazar Gonzalez, Salem Mehtsun, Sunit S. Dixit, Dinesh N. Khanna

Proceedings Volume 3333, Advances in Resist Technology and Processing XV; (1998) https://doi.org/10.1117/12.312480
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

AZ^TM BARLi^TM II materials are used as highly absorptive bottom antireflective coatings (BARC) for i-line lithographic applications. The BARC formulations consist of polymer-bound dyes with the additives formulated in photoresist compatible solvents, containing none of monomeric chromophores, and showing excellent coating uniformity. We have continued to study the functional performance of the BARC materials on swing reduction, lithography, coating surface defect, thermal stability, forced aging behavior, etc. Strategy of formulations and recommendations on standard processing conditions will also be discussed.

Citation Download Citation

Shuji Ding, Ping-Hung Lu, Jianhui Shan, Eleazar Gonzalez, Salem Mehtsun, Sunit S. Dixit, and Dinesh N. Khanna "Process and performance optimization of bottom antireflective coatings", Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); https://doi.org/10.1117/12.312480

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available