Present and future trends in excimer-laser-based microlithography

Frank K. Tittel; Miklos Erdelyi; Zoltan L. Horvath; Armen Kroyan; William L. Wilson Jr.; Michael C. Smayling; Zsolt Bor; Gabor Szabo

doi:10.1117/12.311947

29 June 1998 Present and future trends in excimer-laser-based microlithography

Frank K. Tittel, Miklos Erdelyi, Zoltan L. Horvath, Armen Kroyan, William L. Wilson Jr., Michael C. Smayling, Zsolt Bor, Gabor Szabo

Author Affiliations +

Proceedings Volume 3403, International Conference on Atomic and Molecular Pulsed Lasers II; (1998) https://doi.org/10.1117/12.311947
Event: International Conference on Atomic and Molecular Pulsed Lasers, 1997, Tomsk, Russian Federation

Abstract

Optical microlithography is continuing to play a key role in the fabrication of feature sizes in the 0.25 - 0.1 micrometers regime as the semiconductor industry enters manufacturing of the gigabit chip generation. Several important advances in technologies are needed to achieve this goal. These include the use of excimer lasers and optical resolution enhancement schemes, which will be addressed in this work.

Citation Download Citation

Frank K. Tittel, Miklos Erdelyi, Zoltan L. Horvath, Armen Kroyan, William L. Wilson Jr., Michael C. Smayling, Zsolt Bor, and Gabor Szabo "Present and future trends in excimer-laser-based microlithography", Proc. SPIE 3403, International Conference on Atomic and Molecular Pulsed Lasers II, (29 June 1998); https://doi.org/10.1117/12.311947

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available