Photochemical etching of the ZnSe surface with chlorine

Victor M. Stepanenko; Maria V. Dobrotvorskaya; Pavel V. Mateychenko; Heribert Raaf; Nikolaus Schwentner

doi:10.1117/12.323757

23 September 1998 Photochemical etching of the ZnSe surface with chlorine

Victor M. Stepanenko, Maria V. Dobrotvorskaya, Pavel V. Mateychenko, Heribert Raaf, Nikolaus Schwentner

Proceedings Volume 3424, Inorganic Optical Materials; (1998) https://doi.org/10.1117/12.323757
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

Photochemical reactions at the solid surface can be applied for the microstructuring. Photochemical processes have high anisotropy and don't produce radiation defects in surface layers of materials, providing certain advantages compared to ion, plasma and X-ray technologies. At the moment the most of photoexcitation sources use visible near UV photon range. The increasing of photon energy up to VUV by use of synchrotron radiation (SR) or other source leads to diminishing of the microstructure size to 100 nm and rising of the quantum efficiency of the reaction. In this work photochemical reaction of etching of ZnSe has been studied. Surface of ZnSe crystal (110) was irradiated with photons 4.5 eV < hv < 50 eV (SR) in the chlorine atmosphere at room temperature. By means of XPS, SEM, EDS chemical composition and thickness of the reaction products have been defined. It was shown that the reaction products layer contain of ZnCl₂ with thickness of 100 nm. Evaluated quantum efficiency was about 1. Further, it was demonstrated the possibility of microstructuring at ZnSe surface by photochemical etching with the use of special masks.

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Victor M. Stepanenko, Maria V. Dobrotvorskaya, Pavel V. Mateychenko, Heribert Raaf, and Nikolaus Schwentner "Photochemical etching of the ZnSe surface with chlorine", Proc. SPIE 3424, Inorganic Optical Materials, (23 September 1998); https://doi.org/10.1117/12.323757

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KEYWORDS

Chlorine

Etching

Quantum efficiency

Crystals

Zinc

Zinc oxide

X-rays

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