Wide-scale surface measurement using white light interferometry and atomic force microscopy

Rolf-Juergen Recknagel; Torsten Feigl; Angela Duparre; Gunther Notni

doi:10.1117/12.316465

6 July 1998 Wide-scale surface measurement using white light interferometry and atomic force microscopy

Rolf-Juergen Recknagel, Torsten Feigl, Angela Duparre, Gunther Notni

Proceedings Volume 3479, Laser Interferometry IX: Applications; (1998) https://doi.org/10.1117/12.316465
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

A variety of technical applications require surface roughnesses to be measured and characterized over a wide range of scale. In order to meet these requirements it is inevitable to combine different measurement techniques by using an assembled PSD. As an example the white light interferometry (WLI) is compared to the atomic force microscopy (AFM) by measuring a binary grating. The results show a good correspondence of the profiles and power spectral densities (PSD). Furthermore, rough surfaces are measured by WLI and AFM and combined by means of the PSD in a wide range of scale covering up to 5 orders of magnitude. It will be shown, that in some cases only the combined PSD will give the right results to describe the surface by a model PSD. It turns out that either the fractal or the ABC-model are very well suited.

Citation Download Citation

Rolf-Juergen Recknagel, Torsten Feigl, Angela Duparre, and Gunther Notni "Wide-scale surface measurement using white light interferometry and atomic force microscopy", Proc. SPIE 3479, Laser Interferometry IX: Applications, (6 July 1998); https://doi.org/10.1117/12.316465

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