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Although it is generally accepted that in-line and off-line electrical characterization measurements have value in a semiconductor fab, their actual value to a specific fab depends heavily on a wide variety of parameters such as: the fab's end product and throughput; the sensitivity of the measurements to various process deviations and the implementation cost; etc. This paper will detail some of these dependencies and develop an economic method for the justification of various in-line electrical tests.
Steven R. Weinzierl andTim E. Turner
"Value added with in-line electrical characterization: fact or fiction?", Proc. SPIE 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II, (27 August 1998); https://doi.org/10.1117/12.324396
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Steven R. Weinzierl, Tim E. Turner, "Value added with in-line electrical characterization: fact or fiction?," Proc. SPIE 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II, (27 August 1998); https://doi.org/10.1117/12.324396