Micromachined aperture probe for combined atomic force and near-field scanning optical microscopy (AFM/NSOM)

Dietrich Drews; Wilfried Noell; Wolfgang Ehrfeld; Manfred Lacher; Karsten Mayr; Othmar Marti; C. Serwatzy; Michael Abraham

doi:10.1117/12.324079

1 September 1998 Micromachined aperture probe for combined atomic force and near-field scanning optical microscopy (AFM/NSOM)

Dietrich Drews, Wilfried Noell, Wolfgang Ehrfeld, Manfred Lacher, Karsten Mayr, Othmar Marti, C. Serwatzy, Michael Abraham

Author Affiliations +

Proceedings Volume 3512, Materials and Device Characterization in Micromachining; (1998) https://doi.org/10.1117/12.324079
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

A novel concept for the realization of a multifunctional scanning probe designed for simultaneous atomic force microscopy and near-field scanning optical microscopy measurements is described. It is based on micromachining and thin film technology and includes the fabrication of a cantilever, an integrated optical waveguide, an aperture probe tip, and the integration of all components into the complete sensor. Key processes are the fabrication of the probe providing a sharp tip together with a small optical aperture and the coupling of light from the integrated optical waveguide into the probe tip. The aperture probe consists of a transparent silicon nitride cone covered with aluminum except for the sharp cone tip thus forming a circular aperture around the protruding tip apex. In order to couple light from the waveguide into the tip a simple structure has been developed and optimized using numerical simulation procedures for the electromagnetic field distribution in the coupling structure. The complete sensor is fabricated in a reliable batch process and experimental evidence for the validity of the coupling concept is given.

Citation Download Citation

Dietrich Drews, Wilfried Noell, Wolfgang Ehrfeld, Manfred Lacher, Karsten Mayr, Othmar Marti, C. Serwatzy, and Michael Abraham "Micromachined aperture probe for combined atomic force and near-field scanning optical microscopy (AFM/NSOM)", Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); https://doi.org/10.1117/12.324079

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