Novel beam-steering micromirror device

R. Wayne Fuchs; Hubert Jerominek; Nicholas R. Swart; Yacouba Diawara; Mario Lehoux; Ghislain Bilodeau; Simon Savard; Felix Cayer; Yves Rouleau; Patrick Lemire

doi:10.1117/12.324270

2 September 1998 Novel beam-steering micromirror device

R. Wayne Fuchs, Hubert Jerominek, Nicholas R. Swart, Yacouba Diawara, Mario Lehoux, Ghislain Bilodeau, Simon Savard, Felix Cayer, Yves Rouleau, Patrick Lemire

Author Affiliations +

Proceedings Volume 3513, Microelectronic Structures and MEMS for Optical Processing IV; (1998) https://doi.org/10.1117/12.324270
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

A novel type of light modulating micromirror device has been designed and fabricated. A unique hinge structure provides the device with the potential for modulating both the phase and amplitude of light signals, while its high thermal conductivity makes the device amenable to high power laser applications. An extremely high fill factor can be attained since the hinges lie entirely beneath the mirror surface. This hidden hinge structure is comprised of a single level and therefore involves a simple fabrication process. Micromirrors with dimensions ranging from 100 micrometers X 100 micrometers to 300 micrometers X 300 micrometers with maximum deflection angles from 2 degree(s) to 4 degree(s) were fabricated. The devices were characterized in terms of the reflecting surface optical quality, the operational modes attainable, the critical voltages (as low as 15 volts), and the response time (as short as 125 microsecond(s) ).

Citation Download Citation

R. Wayne Fuchs, Hubert Jerominek, Nicholas R. Swart, Yacouba Diawara, Mario Lehoux, Ghislain Bilodeau, Simon Savard, Felix Cayer, Yves Rouleau, and Patrick Lemire "Novel beam-steering micromirror device", Proc. SPIE 3513, Microelectronic Structures and MEMS for Optical Processing IV, (2 September 1998); https://doi.org/10.1117/12.324270

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