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10 September 1998 Microgasketing and adhesive wicking techniques for fabrication of microfluidic devices
Chang-Jin Kim
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Proceedings Volume 3515, Microfluidic Devices and Systems; (1998) https://doi.org/10.1117/12.322072
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States
Abstract
Microgasketing procedure, developed for MEMS fluidic device fabrication, is described. Planar-processed microdevices of a volume even less than 1 nl can be selectively filled with liquid and sealed at room temperature in a batch fashion. Isolating a liquid within such a small device area by the gasketing and minimizing air traps during sealing by controlled wicking are the key issues addressed. Two unique microdevices made possible by the described technique are presented: (1) a microrelay switched by a liquid-metal droplet (10 micrometers in diameter), and (2) a highly efficient (e.g., power consumption < 10 (mu) W with driving potential < 10 V) liquid micromotor driven by surface tension force.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Chang-Jin Kim "Microgasketing and adhesive wicking techniques for fabrication of microfluidic devices", Proc. SPIE 3515, Microfluidic Devices and Systems, (10 September 1998); https://doi.org/10.1117/12.322072
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Cited by 3 scholarly publications and 2 patents.
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KEYWORDS
Liquids
Adhesives
Epoxies
Microfluidics
Fabrication
Glasses
Microrelays
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