Design and fabrication of 128X128 diffractive microlens arrays for infrared focal plane arrays

Yi Li; Xinjian Yi; Jianhua Hao

doi:10.1117/12.323639

25 September 1998 Design and fabrication of 128X128 diffractive microlens arrays for infrared focal plane arrays

Yi Li, Xinjian Yi, Jianhua Hao

Proceedings Volume 3545, International Symposium on Multispectral Image Processing (ISMIP'98); (1998) https://doi.org/10.1117/12.323639
Event: International Symposium on Multispectral Image Processing, 1998, Wuhan, China

Abstract

128 X 128 diffractive microlens arrays have been designed by considering the independent optical and processing parameters for 3 - 5 micrometers wavelength with a microlens size of 100 micrometers . The lens F number and array pitch are 1.5 and 100 micrometers , respectively. The diffractive microlens arrays have been fabricated on the surface of Si substrates by successive photolithography and Ar⁺ ion-beam-etching technique. The practical processes and fabrication method are discussed. The optical characteristics and measurements of the diffractive microlens arrays are presented.

Citation Download Citation

Yi Li, Xinjian Yi, and Jianhua Hao "Design and fabrication of 128X128 diffractive microlens arrays for infrared focal plane arrays", Proc. SPIE 3545, International Symposium on Multispectral Image Processing (ISMIP'98), (25 September 1998); https://doi.org/10.1117/12.323639

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available