Silicon field emitter microtip array fabricated by ion-beam etching

Xinyu Zhang; Xinjian Yi; Miao He; Xing-Rong Zhao

doi:10.1117/12.317990

12 August 1998 Silicon field emitter microtip array fabricated by ion-beam etching

Xinyu Zhang, Xinjian Yi, Miao He, Xing-Rong Zhao

Proceedings Volume 3551, Integrated Optoelectronics II; (1998) https://doi.org/10.1117/12.317990
Event: Photonics China '98, 1998, Beijing, China

Abstract

A relatively simple and effective method to fabricate 128- X 128-element emission microtips array on the surface of silicon substrate is proposed. The method mainly involves photolithographic process and argon ion beam etching. Typical center-to-center spacing of microtips fabricated is 50 micrometer, typical height is about 11 micrometer, and typical sharpness is about 9 sr. The scanning electron microscope analysis and the surface style measurement are presented for the surface morphology of two kinds of silicon emitters microtips (square-based pyramidal microtips and circle-based cone microtips) and circle microtips array. The experiments show that the technique used can be applied to fabricate silicon emitter microtips array and circle microtips array of larger area.

Citation Download Citation

Xinyu Zhang, Xinjian Yi, Miao He, and Xing-Rong Zhao "Silicon field emitter microtip array fabricated by ion-beam etching", Proc. SPIE 3551, Integrated Optoelectronics II, (12 August 1998); https://doi.org/10.1117/12.317990

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available