Modeling and simulation of optimization design for structure parameters of CCD intersection measurement system

Haibao Lu; Huayong Yang; Wusheng Luo; Shuhua Yan; Qinqun Feng

doi:10.1117/12.318390

10 August 1998 Modeling and simulation of optimization design for structure parameters of CCD intersection measurement system

Haibao Lu, Huayong Yang, Wusheng Luo, Shuhua Yan, Qinqun Feng

Author Affiliations +

Proceedings Volume 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II; (1998) https://doi.org/10.1117/12.318390
Event: Photonics China '98, 1998, Beijing, China

Abstract

In order to obtain high measuring accuracy, a method of optimization-design is established. Then the computer simulation for the model is introduced. Finally, as results, the optimum structure parameters corresponding to two kinds of target-planes with different size are tabled. In addition, a group of 3D figures of the error distribution are given.

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Haibao Lu, Huayong Yang, Wusheng Luo, Shuhua Yan, and Qinqun Feng "Modeling and simulation of optimization design for structure parameters of CCD intersection measurement system", Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); https://doi.org/10.1117/12.318390

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