Spectroellipsometric study of diamondlike carbon films

Wensheng Guo; Saipeng Wong; Ziqing Zhu

doi:10.1117/12.318355

10 August 1998 Spectroellipsometric study of diamondlike carbon films

Wensheng Guo, Saipeng Wong, Ziqing Zhu

Proceedings Volume 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II; (1998) https://doi.org/10.1117/12.318355
Event: Photonics China '98, 1998, Beijing, China

Abstract

Diamond-like carbon film (DLC) is well known for its optical, electrical and mechanical properties. However, its properties can vary widely from graphite to diamond-like, strongly depending on the film preparation. So the determination of sp³/sp² ratios of the DLC films is very important. In this work, a series of DLC films have been prepared on silicon substrates by Filtered Arc Deposition (FAD) and an optical method - spectroscopic ellipsometry (SE) has been applied to study these samples in the visible wavelength range. In the analysis of SE spectra, a single DLC layer on Si substrate model has been used and the DLC layer simply consists of sp³, sp² and void constituents. The Bruggeman effective medium approximation has been applied to calculate the dielectric response of these three components. From the interpretation of SE spectra, the film thicknesses and the volume fractions of sp³, sp² and void have been derived. SE results show: the fitted film thicknesses are consistent with those of Rutherford Backscattering spectroscopy; the fractions of sp³ correlate wit results of electron energy loss spectroscopy studies; for all these samples, the concentrations of void are very small which implies the compact DLC layers. It shows that SE is a very useful and promising optical method to determine the sp³/sp² ratios of the DLC films.

Citation Download Citation

Wensheng Guo, Saipeng Wong, and Ziqing Zhu "Spectroellipsometric study of diamondlike carbon films", Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); https://doi.org/10.1117/12.318355

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