Laser-induced nonthermal surface modification of aluminum

David P. Taylor; Henry Helvajian

doi:10.1117/12.352682

15 July 1999 Laser-induced nonthermal surface modification of aluminum

David P. Taylor, Henry Helvajian

Proceedings Volume 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV; (1999) https://doi.org/10.1117/12.352682
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

Low fluence UV laser stimulate desorption of ions form metal surfaces leads to the production of high kinetic energy species and also modifies the surface left behind. Both of these effects are small for an individual laser shot. The number density of the desorbed ions by the laser is very low - much less than a monolayer per pulse. The changes in the crystal surface are also subtle. However, in both cases there are cumulative effects after many laser shots which cannot be attributed to thermal or plasma pulse laser interaction processes. There is no evidence for thermal ions in the TOF mass spectrum. A laser ionization experiment was performed to measure the kinetic energy distribution of the desorbed neutral aluminum species. The high kinetic energy Al⁺ ions were used as monitor for insuring that the laser induced desorption process was always in the non- thermal regime during the surface modification experiments. We observe, via SEM, surface modification only after exposure to a large number of laser shots. Examination of the laser exposed surface with electron microscopy reveals quasiperiodic patterns made up of sub-micron scale ridges. After exposures to more than 100K laser shots, the quasiperiodic patterns break-up into irregular nodule-like shapes. Our data indicates the surface modification occurs without desorbing significant amounts of material.

Citation Download Citation

David P. Taylor and Henry Helvajian "Laser-induced nonthermal surface modification of aluminum", Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); https://doi.org/10.1117/12.352682

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available