Measurements of thin film disks by surface reflectance analysis

David Klein; Gerard H. Vurens

doi:10.1117/12.343708

29 March 1999 Measurements of thin film disks by surface reflectance analysis

David Klein, Gerard H. Vurens

Proceedings Volume 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays; (1999) https://doi.org/10.1117/12.343708
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

Scanning Reflectance Analysis^TM (SRA^TM) is an emerging technique that has been rapidly gaining acceptance as a powerful tool for the analysis of thin film disks. This is because the technique provides a means to generate high resolution maps of the thickness and composition of lubricant, overcoat, and contaminant films on a disk in about ten seconds. Common quality assurance applications have included overcoat thickness, composition, and uniformity measurements as well as substrate polish quality measurements and stain identification. Applications in failure analysis have included lubricant pooling and degradation, carbon wear, corrosion, and contaminant detection. This paper will focus on the design and principle of operation of a SRA. The discussion will include the general theory that governs the machine's design and the data it produces as well as some details that maximize performance and simplify data interpretation. Following this, a few example applications of the technique will be presented.

Citation Download Citation

David Klein and Gerard H. Vurens "Measurements of thin film disks by surface reflectance analysis", Proc. SPIE 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays, (29 March 1999); https://doi.org/10.1117/12.343708

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