Color filter array for CCD and CMOS image sensors using a chemically amplified thermally cured pre-dyed positive-tone photoresist for 365-nm lithography

Harris R. Miller

doi:10.1117/12.350159

11 June 1999 Color filter array for CCD and CMOS image sensors using a chemically amplified thermally cured pre-dyed positive-tone photoresist for 365-nm lithography

Harris R. Miller

Author Affiliations +

Proceedings Volume 3678, Advances in Resist Technology and Processing XVI; (1999) https://doi.org/10.1117/12.350159
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

'On-chip' color filters are commonly used to convert monochromatic, solid-state image sensor into color sensors because they offer a good compromise between cost and resolution for digital cameras. The color filters are fabricated directly onto the surface of the CMOS or CCD image sensors, which generates a mosaic array of pixel-size filter elements. Diazonaphthoquinone-novolak photoresist is used to produce these filters by successively depositing and patterning each color layer. The choice of colors can vary from additive to subtractive or combinations of both.

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Harris R. Miller "Color filter array for CCD and CMOS image sensors using a chemically amplified thermally cured pre-dyed positive-tone photoresist for 365-nm lithography", Proc. SPIE 3678, Advances in Resist Technology and Processing XVI, (11 June 1999); https://doi.org/10.1117/12.350159

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