Fizeau confocal laser scanning interference microscope

Pablo F. Meilan; Mario Garavaglia

doi:10.1117/12.346812

29 April 1999 Fizeau confocal laser scanning interference microscope

Pablo F. Meilan, Mario Garavaglia

Proceedings Volume 3729, Selected Papers from International Conference on Optics and Optoelectronics '98; (1999) https://doi.org/10.1117/12.346812
Event: Selected Papers from the International Conference on Optics and Optoelectronics, 1998, Dehradun, India

Abstract

In this paper, Fizeau interferometry is introduced in conjunction with confocal laser scanning microscope as a new interferential method. In this preliminary investigation interference fringes formation was studied. A theoretical model of the method is presented and a comparative analysis with the experimental and theoretical results was performed.

Citation Download Citation

Pablo F. Meilan and Mario Garavaglia "Fizeau confocal laser scanning interference microscope", Proc. SPIE 3729, Selected Papers from International Conference on Optics and Optoelectronics '98, (29 April 1999); https://doi.org/10.1117/12.346812

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