Paper
1 September 1999 A new technique for the measurement of thin film growth
T. F. Morse
Author Affiliations +
Proceedings Volume 3746, 13th International Conference on Optical Fiber Sensors; 374626 (1999) https://doi.org/10.1117/12.2302068
Event: 13th International Conference on Optical Fiber Sensors, 1999, Kyongju, Korea, Republic of
Abstract
By depositing thin films on the end of an optical fiber, it is possible to make simple, in situ measurements of film growth, refractive index, and surface roughness. Agreement with witness samples is excellent.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. F. Morse "A new technique for the measurement of thin film growth", Proc. SPIE 3746, 13th International Conference on Optical Fiber Sensors, 374626 (1 September 1999); https://doi.org/10.1117/12.2302068
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KEYWORDS
Surface roughness

Refractive index

Thin film growth

Optical fibers

Chemical vapor deposition

Reflectivity

In situ metrology

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