Derivation of BRDF data from smooth surface topography of large AFM scans: investigation of the influences of surface figures and AFM artifacts

Hendrik Rothe; Dorothee Hueser; Andre Kasper; Thomas Rinder

doi:10.1117/12.366697

25 October 1999 Derivation of BRDF data from smooth surface topography of large AFM scans: investigation of the influences of surface figures and AFM artifacts

Hendrik Rothe, Dorothee Hueser, Andre Kasper, Thomas Rinder

Author Affiliations +

Proceedings Volume 3784, Rough Surface Scattering and Contamination; (1999) https://doi.org/10.1117/12.366697
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

To measure microroughness, defects and contamination on surfaces such as wafers or optical instruments stray light sensors are a fast means. In order to obtain a traceable quantitative, i.e. metrological, measure of roughness (rms) the relation between rms from BRDF of a stray light sensor and rms from topography has to be given. The quantification of stray light sensor signals can well be done with smooth surfaces that have no defects, since forward simulation of the bidirectional reflectance distribution function (BRDF) from smooth surfaces obeying Rayleigh-Rice approximation is possible. We have measured the topography of large areas up to 315 X 315 micrometer² with an atomic force microscope (AFM) by patching several scans (up to 25) with overlap to obtain bandwidth limits compatible to our stray light sensor. In profilometry roughness usually is evaluated after detrending, i.e. subtraction of surface figures. Hence for an evaluation of the roughness parameter rms by integrating the BRDF of a stray light measurement, the integration limits need to be chosen carefully. This paper gives a detailed discussion on a quantification of roughness measures.

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Hendrik Rothe, Dorothee Hueser, Andre Kasper, and Thomas Rinder "Derivation of BRDF data from smooth surface topography of large AFM scans: investigation of the influences of surface figures and AFM artifacts", Proc. SPIE 3784, Rough Surface Scattering and Contamination, (25 October 1999); https://doi.org/10.1117/12.366697

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