Paper
27 October 1999 Micromirrors used for waveguide coupling
P. Falgayrettes, Paul Coudray, Jerome Porque, Pascal Gall-Borrut
Author Affiliations +
Abstract
To confirm the credibility of the integrated optical circuits based on organic-inorganic materials, the problem of connection with an optical fiber, but also between inter and intra-cards or with a matrix of laser diodes such as VCSEL have to be resolved. In this work, we propose to integrate in an optical device some `objects' which could simplify the alignment procedure in the both last cases. We fabricated a 45 degree(s) tilted mirror made by EBID method. This mirror was placed right in front of an optical waveguide output.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
P. Falgayrettes, Paul Coudray, Jerome Porque, and Pascal Gall-Borrut "Micromirrors used for waveguide coupling", Proc. SPIE 3803, Materials and Devices for Photonic Circuits, (27 October 1999); https://doi.org/10.1117/12.366753
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Waveguides

Mirrors

Micromirrors

Optical components

Electron beams

Minerals

Sol-gels

Back to Top