Paper
10 June 1999 128x128 and 384x288 HgCdTe staring focal plane arrays
L. A. Bovina, K. O. Boltar, I. D. Bourlakov, S. V. Golovin, V. Y. Ivanov, L. D. Saginov, Vitaly I. Stafeev, V. M. Akimov, E. A. Klimanov, Vladimir M. Lakeenkov, Yuri G. Sidorov
Author Affiliations +
Proceedings Volume 3819, International Conference on Photoelectronics and Night Vision Devices; (1999) https://doi.org/10.1117/12.350892
Event: International Conference on Photoelectronics and Night Vision Devices, 1998, Moscow, Russian Federation
Abstract
LWIR staring 128 X 128 and 384 X 384 focal plane arrays (FPA) have been developed and investigated. FPAs have been manufactured on the base of mercury cadmium telluride epitaxial layers grown both by liquid phase epitaxy and molecular beam epitaxy. The photodiode array was bonded via the indium bumps to the silicon MOS-multiplexer, which ensure reading, integration and output of the photosignals from the focal plane. Performances of FPAs produced by these different epitaxial methods are analyzed.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
L. A. Bovina, K. O. Boltar, I. D. Bourlakov, S. V. Golovin, V. Y. Ivanov, L. D. Saginov, Vitaly I. Stafeev, V. M. Akimov, E. A. Klimanov, Vladimir M. Lakeenkov, and Yuri G. Sidorov "128x128 and 384x288 HgCdTe staring focal plane arrays", Proc. SPIE 3819, International Conference on Photoelectronics and Night Vision Devices, (10 June 1999); https://doi.org/10.1117/12.350892
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KEYWORDS
Staring arrays

Photodiodes

Liquid phase epitaxy

Mercury cadmium telluride

Resistance

Indium

Semiconducting wafers

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