Powder metallurgic giant magnetostrictive material and its applications in microactuators and microsensors

Hiroshi Eda; T. Mori; Libo Zhou; K. Kubota; Jun Shimizu

doi:10.1117/12.360461

3 September 1999 Powder metallurgic giant magnetostrictive material and its applications in microactuators and microsensors

Hiroshi Eda, T. Mori, Libo Zhou, K. Kubota, Jun Shimizu

Author Affiliations +

Proceedings Volume 3875, Materials and Device Characterization in Micromachining II; (1999) https://doi.org/10.1117/12.360461
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

In this research, the authors have proposed and developed a new manufacturing process for giant magnetostrictive material (GMM) by using powder metallurgic technique. The results obtained in this paper have verified that the powder metallurgic GMM is quite comparable to that made by the well-established Bridgman Method, in terms of large magneto strain, low hysteresis and high repeatability, and yet at one-third cost. More important is that the powder metallurgy is able to achieve a near-net-shape product regardless to the complexity of the geometry and dimension of the size. It opens new possibilities to miniaturize the sensors and actuators down to millimeter or sub-millimeter scale. Using the Joule effect and the inverse Wiedemann effect, a GMM pump and torque sensor have developed in this research to show the potential usage of the powder metallurgic GMM in practical applications.

Citation Download Citation

Hiroshi Eda, T. Mori, Libo Zhou, K. Kubota, and Jun Shimizu "Powder metallurgic giant magnetostrictive material and its applications in microactuators and microsensors", Proc. SPIE 3875, Materials and Device Characterization in Micromachining II, (3 September 1999); https://doi.org/10.1117/12.360461

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