Novel, highly sensitive chemical and biological sensors based on integrated MOEM and MEMS technologies

Fariborz Maseeh; Andrew Swiecki

doi:10.1117/12.361261

2 September 1999 Novel, highly sensitive chemical and biological sensors based on integrated MOEM and MEMS technologies

Fariborz Maseeh, Andrew Swiecki

Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361261
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

IntelliSense Corporation has designed, fabricated, and tested a chemical and biological sensor based on MOEM technology. The sensor is based on novel integrated optic technology. Data collected from the prototype device indicates sensor sensitivity at least three order of magnitude higher than conventional Mack Zhender interferometers. The application specific sensor can be used for single and multi-analyte detection. The design combines a sensing waveguide and a microfabricated fluid delivery system. This integration permits analyte samples to be transported to a reaction well in contact with the sensing surface. In the reaction well, immobilized reagents react with the analyte, changing the optical properties of the waveguide surface. Measuring this change for an array of reaction wells, the sensor selectively identifies the composition and concentration of test substances. The novel sensing technology is based on pairs of MOEM optical waveguides. For the tests conducted, laser light was coupled into the waveguides, and measured. Because the evanescent field of the propagating light penetrated the waveguide surface, the coupled light was affected by the waveguide surface. Changes in the waveguide surface created by analyte-reagent bonding were measured. Sensors based on the developed technology provide low cost, small, sensitive, and selective sensing solutions for chemical and biological applications.

Citation Download Citation

Fariborz Maseeh and Andrew Swiecki "Novel, highly sensitive chemical and biological sensors based on integrated MOEM and MEMS technologies", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); https://doi.org/10.1117/12.361261

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Waveguides

Sensors

Microopto electromechanical systems

Microfluidics

Chemical analysis

Integrated optics

Microelectromechanical systems

Show All Keywords

Keywords/Phrases

Search In:

Publication Years