Experimental study of hydrogen-free DLC film deposition by XeCl (308 nm) pulsed laser ablation

Tie-jun Li; Jingru Liu; Li-ge Wang

doi:10.1117/12.376977

1 February 2000 Experimental study of hydrogen-free DLC film deposition by XeCl (308 nm) pulsed laser ablation

Tie-jun Li, Jingru Liu, Li-ge Wang

Proceedings Volume 3885, High-Power Laser Ablation II; (2000) https://doi.org/10.1117/12.376977
Event: Advanced High-Power Lasers and Applications, 1999, Osaka, Japan

Abstract

In this work, hydrogen-free DLC (Diamond Like Carbon) films have been deposited by XeCl (308 nm) pulsed laser ablation of pure graphite target with the base pressure of 1 X 10^-3 Pa at room temperature. The films obtained show remarkable properties similar to those of diamond. Raman spectroscopy analysis gave a broad Raman peak centered at 1523 cm^-1, which indicated that the film had an amorphous structure. FTIR analysis showed that the film head a transmittance above 90% from 2.5 micrometers to 25 micrometers without any absorption peak. Microhardness test showed that the film had a mechanical hardness up to 23 GPa. The film also had chemical inertness in various acids and organic solutions. The effects of experimental parameters on the film properties have been investigated. The optimum dc bias of -500 V and the threshold of laser (308 nm) power density of 3 X 10⁸ W/cm² which is necessary to obtain DLC film have been observed. The emission spectra of laser induced plasma have been obtained to study the ionization state of particles in laser-induced plasma. Considering the experimental results, we suggest that the energy and ionicity of the particles in laser-induced plasma should be important factors in the formation of DLC film. Particles with higher energy and higher ionicity will result in DLC films with excellent properties.

Citation Download Citation

Tie-jun Li, Jingru Liu, and Li-ge Wang "Experimental study of hydrogen-free DLC film deposition by XeCl (308 nm) pulsed laser ablation", Proc. SPIE 3885, High-Power Laser Ablation II, (1 February 2000); https://doi.org/10.1117/12.376977

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