Design and fabrication of novel photodetector arrays

Mary J. Li; Christine A. Allen; Shahid Aslam; Tina C. Chen; Fred M. Finkbeiner; Scott A. Gordon; Jonathan L. Kuhn; David Brent Mott; Carl Michael Stahle; Caroline Kilbourn Stahle; Nilesh Tralshawala; Liqin L. Wang

doi:10.1117/12.364483

1 October 1999 Design and fabrication of novel photodetector arrays

Mary J. Li, Christine A. Allen, Shahid Aslam, Tina C. Chen, Fred M. Finkbeiner, Scott A. Gordon, Jonathan L. Kuhn, David Brent Mott, Carl Michael Stahle, Caroline Kilbourn Stahle, Nilesh Tralshawala, Liqin L. Wang

Author Affiliations +

Proceedings Volume 3892, Device and Process Technologies for MEMS and Microelectronics; (1999) https://doi.org/10.1117/12.364483
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

We are developing novel photodetector arrays based on superconducting transition-edge sensor (TES) and pop-up detector (PUD) technologies. The TES has the potential for a new generation of high sensitivity photodetectors from the IR to the x-ray. This is directly due to the sharpness of the resistance change with temperature at the superconducting transition. The TESs are deposited on the PUD arrays and serve as the sensing elements. The PUDs are close-packed, folded membrane arrays that provide the TES substrate and the thermal isolation required by the bolometers and microcalorimeters. This paper presents the processing-related characterization result of preliminary TES and PUD designs. The gaol of this work is to fabricate a new generation of x-ray calorimeters and IR bolometers for space flight projects.

Citation Download Citation

Mary J. Li, Christine A. Allen, Shahid Aslam, Tina C. Chen, Fred M. Finkbeiner, Scott A. Gordon, Jonathan L. Kuhn, David Brent Mott, Carl Michael Stahle, Caroline Kilbourn Stahle, Nilesh Tralshawala, and Liqin L. Wang "Design and fabrication of novel photodetector arrays", Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); https://doi.org/10.1117/12.364483

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