Self-mixing interferometry for distance and displacement measurement by Fourier transform method

Ming Wang; Takahiko Sato; Guanming Lai; Shigenobu Shinohara

doi:10.1117/12.380549

29 March 2000 Self-mixing interferometry for distance and displacement measurement by Fourier transform method

Ming Wang, Takahiko Sato, Guanming Lai, Shigenobu Shinohara

Proceedings Volume 3945, Laser Diodes and LEDs in Industrial, Measurement, Imaging, and Sensors Applications II; Testing, Packaging, and Reliability of Semiconductor Lasers V; (2000) https://doi.org/10.1117/12.380549
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

A compact optical sensor for the measurement of distance and displacement has been developed by using the self-mixing effect of a laser diode. Although the principle of self-mixing interference is different from conventional interference, it is shown that FFT analysis technique can also be used to detect the signal phase and increase the measurement precision of self-mixing interferometry. The optical phase of self- mixing interference is detected by FFT analysis, and the phase error caused by the laser frequency fluctuation was reduced by using a reference reflector. By these techniques, we can determine the distance from centimeters to a few meters and the displacement with nanometer precision.

Citation Download Citation

Ming Wang, Takahiko Sato, Guanming Lai, and Shigenobu Shinohara "Self-mixing interferometry for distance and displacement measurement by Fourier transform method", Proc. SPIE 3945, Laser Diodes and LEDs in Industrial, Measurement, Imaging, and Sensors Applications II; Testing, Packaging, and Reliability of Semiconductor Lasers V, (29 March 2000); https://doi.org/10.1117/12.380549

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