Paper
5 July 2000 Determining and reducing the overhead losses in an ASIC-type environment
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Abstract
With the reduce cycle times required to produce customized chips to the end user, the inherent overhead time that is involved with running small lots or even send ahead wafers need to be minimized and optimized to provide reasonable levels of raw throughput. By understanding the process, from the completion of one lot to the start of the next, measurements and actions can be undertaken to outline improvements in the process.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dennis B. Ames "Determining and reducing the overhead losses in an ASIC-type environment", Proc. SPIE 4000, Optical Microlithography XIII, (5 July 2000); https://doi.org/10.1117/12.389085
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KEYWORDS
Semiconducting wafers

Lithography

Reticles

Optical alignment

Lithographic illumination

Calibration

Finite element methods

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