Characteristics of single-pulse excimer laser beam profile on the low-temperature poly-Si TFTs

ChuJung Shih; LiMing Wang; ShihChang Chang; I-Min Lu; I-Wei Wu

doi:10.1117/12.389423

30 June 2000 Characteristics of single-pulse excimer laser beam profile on the low-temperature poly-Si TFTs

ChuJung Shih, LiMing Wang, ShihChang Chang, I-Min Lu, I-Wei Wu

Proceedings Volume 4079, Display Technologies III; (2000) https://doi.org/10.1117/12.389423
Event: Photonics Taiwan, 2000, Taipei, Taiwan

Abstract

In this study, the effects of laser beam profiles were investigated on the crystallization of poly-Si films. `One Pulse' laser crystallized poly-Si was analyzed by SEM and alpha-step to distinguish the effects of non-uniform laser beam profiles. Surface smoothness of poly-Si films with various laser-overlapping ratios was also measured to investigate the effects of laser beam profiles. Then the relationship of TFT characteristics and laser overlapping ratios will be discussed.

Citation Download Citation

ChuJung Shih, LiMing Wang, ShihChang Chang, I-Min Lu, and I-Wei Wu "Characteristics of single-pulse excimer laser beam profile on the low-temperature poly-Si TFTs", Proc. SPIE 4079, Display Technologies III, (30 June 2000); https://doi.org/10.1117/12.389423

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