Microfabrication process study for stator winding of electromagnetic micromotor

Xiaolin Zhao; Bingchu Cai; Chunsheng Yang; Chen Zhang

doi:10.1117/12.408401

29 November 2000 Microfabrication process study for stator winding of electromagnetic micromotor

Xiaolin Zhao, Bingchu Cai, Chunsheng Yang, Chen Zhang

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408401
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

The micro-fabrication process for electromagnetic micro- motor stator winding, including adopting of new insulating material such as polyimide, is discussed in present study. A diameter of 2 mm electromagnetic micro-motor after adopting the new micro-fabrication process improves its performance. The motor output torque is 25% higher than before, and the operating temperature can reach 180 degree(s)C. Two examples of practical usage of micro-motor made by new process are given.

Citation Download Citation

Xiaolin Zhao, Bingchu Cai, Chunsheng Yang, and Chen Zhang "Microfabrication process study for stator winding of electromagnetic micromotor", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408401

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