Optical and electrochemical properties of sol-gel-deposited tantalum pentoxide thin films

Qinyuan Zhang; Jun Shen; Guangming Wu; Bin Zhou; Junxia Lu; S. M. Attia; Zhongsheng Deng; Jue Wang

doi:10.1117/12.408490

29 November 2000 Optical and electrochemical properties of sol-gel-deposited tantalum pentoxide thin films

Qinyuan Zhang, Jun Shen, Guangming Wu, Bin Zhou, Junxia Lu, S. M. Attia, Zhongsheng Deng, Jue Wang

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408490
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

Sol-gel spin-coating technique was applied to produce tantalum pentoxide thin films. Pseudo-ternary phase diagrams were used to outline the sol-solution stability and the optimal Ta₂O₅ thin films formation regions of Ta(OC₂H₅)₅-C₂H₅OH- CH₃COOH-H₂O system. Forbidden band gap of Ta₂O₅ thin film was calculated and found to be Eg equals 3.7 ev. Room temperature cyclic voltammetric measurements clearly revealed a protonic conductor behavior for Ta₂O₅ thin films.

Citation Download Citation

Qinyuan Zhang, Jun Shen, Guangming Wu, Bin Zhou, Junxia Lu, S. M. Attia, Zhongsheng Deng, and Jue Wang "Optical and electrochemical properties of sol-gel-deposited tantalum pentoxide thin films", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408490

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available