Theoretical study of monolithic pyroelectric sensor arrays by thermal diffusion equation

Jian Yu; Yunong Ling; Jinglan Sun; Xiangjian Meng; Junhao Chu; Dingyuan Tang

doi:10.1117/12.408357

29 November 2000 Theoretical study of monolithic pyroelectric sensor arrays by thermal diffusion equation

Jian Yu, Yunong Ling, Jinglan Sun, Xiangjian Meng, Junhao Chu, Dingyuan Tang

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408357
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

Distributed parameter model is used for computation of the performances of single pixel of PZT ferroelectric thin film infrared uncooled focal plane array (IR-UFPA) with two kinds of thermal isolation structures. The detector performances are found to be related closely to the thermal isolation structure. The preferred thickness of pyroelectric thin film is in the region of 0.3 - 2 micrometers for pixel dimensions 50 X 50 and 100 X 100 micrometers ². And the preamplifier current noise is the dominant noise when it more than 10^-16 A(DOT)Hz^-1/2 in PZT-UFPA device.

Citation Download Citation

Jian Yu, Yunong Ling, Jinglan Sun, Xiangjian Meng, Junhao Chu, and Dingyuan Tang "Theoretical study of monolithic pyroelectric sensor arrays by thermal diffusion equation", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408357

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