Photoreceiver array with near-field resolution capability

Bharath Seshadri; Jianjing Tang; Irving Chyr; Andrew J. Steckl; Fred Richard Beyette Jr.

doi:10.1117/12.409235

17 November 2000 Photoreceiver array with near-field resolution capability

Bharath Seshadri, Jianjing Tang, Irving Chyr, Andrew J. Steckl, Fred Richard Beyette Jr.

Proceedings Volume 4109, Critical Technologies for the Future of Computing; (2000) https://doi.org/10.1117/12.409235
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

It has been suggested that ultrahigh density optical storage systems could be realized by storing data in patterns with spatial coordinates below the far-field resolution limit. While the ability to write data on these fine dimensions has been shown, the ability to read data with sub-lambda resolution has proven problematic. This is especially true for memory systems that require page oriented memory access. We present a novel near-field detector array technology that is expected to satisfy the requirement of these next generation optical memory systems. Based on CMOS photoreceiver arrays and a silicon based aperture array, our device's technology is implemented using standard fabrication processes to yield a planar, near-field photoreceiver array technology. While the photoreceiver technology is an important component of our device technology, the aperture array is the fundamental component designed to enable data detection with near-field resolution. Using micro-machining technology pioneered for Micro Electro-Mechanical Systems (MEMS), fabrication of our aperture arrays depends on KOH etching of the <100> Si planes. Focused Ion Beam milling is used to realize the apertures in a thin gold film deposited on a silicon dioxide layer. We present a detailed description of both the photoreceiver circuit and the aperture array fabrication method. Independent characterization of both the photoreceiver circuit and the aperture array is also included.

Citation Download Citation

Bharath Seshadri, Jianjing Tang, Irving Chyr, Andrew J. Steckl, and Fred Richard Beyette Jr. "Photoreceiver array with near-field resolution capability", Proc. SPIE 4109, Critical Technologies for the Future of Computing, (17 November 2000); https://doi.org/10.1117/12.409235

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