Paper
22 November 2000 Performance evaluation of micromachined mirror arrays for adaptive optics
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Abstract
The performance of different MEMS mirrors from Boston University, MEMS Optical LLC, University of Colorado and OKO Technologies was studied in respect to an application in a model-free adaptive optics system. The frequency response characteristic was determined in a simple laser beam focusing set-up. Closed-loop adaptation experiments were performed using a VLSI controller system implementing a stochastic parallel gradient descent optimization algorithm. The system behavior using different MEMS mirror types, esp. adaptation speed, was compared.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas Weyrauch, Mikhail A. Vorontsov, Thomas G. Bifano, Adisorn Tuantranont, Victor M. Bright, John R. Karpinsky, and Jay A. Hammer "Performance evaluation of micromachined mirror arrays for adaptive optics", Proc. SPIE 4124, High-Resolution Wavefront Control: Methods, Devices, and Applications II, (22 November 2000); https://doi.org/10.1117/12.407514
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Cited by 9 scholarly publications.
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KEYWORDS
Mirrors

Microelectromechanical systems

Actuators

Adaptive optics

Control systems

Deformable mirrors

Very large scale integration

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