VCSEL-based MOEMS architectures: from nanofabrication to environmental sensing ?

Christophe Gorecki

doi:10.1117/12.405341

26 October 2000 VCSEL-based MOEMS architectures: from nanofabrication to environmental sensing ?

Christophe Gorecki

Proceedings Volume 4134, Photonics for Space Environments VII; (2000) https://doi.org/10.1117/12.405341
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

We present an original MOEMS architecture that combines the optical feedback properties of a VCSEL cavity with the nanometer- scale resolution of a GaAs micromachined tip. First, we investigate the effects of external optical feedback on the threshold and spectral characteristics of VCSELs. Second, theoretical analysis and experimental evidence demonstrate the practicability of VCSEL feedback as a principle of optical detection for SNOM microscopy. Finally, we propose a compact architecture of a SNOM sensor with a microtip integrated beneath the VCSEL, report the preliminary results of fabrication of the device, and discuss the opportunity of such architecture in space applications.

Citation Download Citation

Christophe Gorecki "VCSEL-based MOEMS architectures: from nanofabrication to environmental sensing ?", Proc. SPIE 4134, Photonics for Space Environments VII, (26 October 2000); https://doi.org/10.1117/12.405341

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