AirJet paper mover: an example of mesoscale MEMS

David K. Biegelsen; Andrew A. Berlin; Patrick Cheung; Markus P.J. Fromherz; David Goldberg; Warren B. Jackson; Bryan Preas; James Reich; Lars E. Swartz

doi:10.1117/12.395620

15 August 2000 AirJet paper mover: an example of mesoscale MEMS

David K. Biegelsen, Andrew A. Berlin, Patrick Cheung, Markus P.J. Fromherz, David Goldberg, Warren B. Jackson, Bryan Preas, James Reich, Lars E. Swartz

Author Affiliations +

Proceedings Volume 4176, Micromachined Devices and Components VI; (2000) https://doi.org/10.1117/12.395620
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

The motion of human scale objects requires MEMS-like device arrays capable of providing reasonable forces ($GTR mN) over human scale distances (10-100 cm). In principle batch fabricated values controlling air jets can satisfy these actuation requirements. By extending printed circuit board technology to include electromechanical actuation, analogous to the extension of VLSI to MEMS, the requirement of low system cost can be achieved through batch fabrication and integration of the transduction elements with computational and communication elements. In this paper we show that modulated air jets arrayed with position sensors can support and accelerate flexible media without physical contact. Precise motion control with three degrees of freedom parallel to the array, using high flow, low pressure air jet arrays is enabled using electrostatic valves having opening and closing times of approximately equals 1 ms. We present results of an exemplary platform based on printed circuit board technologies, having an array of 576 electrostatic flap valvves (1152 for double-sided actuation) and associated oriented jets, and an integrated array of 32,000 optical sensors for high resolution detection of paper edge positions. Under closed loop control edge positioning has a standard deviation of approximately equals 25 microns. Fabrication and control of the system is described.

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David K. Biegelsen, Andrew A. Berlin, Patrick Cheung, Markus P.J. Fromherz, David Goldberg, Warren B. Jackson, Bryan Preas, James Reich, and Lars E. Swartz "AirJet paper mover: an example of mesoscale MEMS", Proc. SPIE 4176, Micromachined Devices and Components VI, (15 August 2000); https://doi.org/10.1117/12.395620

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