From research to product: the CMOS MEMS case

Henry Baltes

doi:10.1117/12.395624

15 August 2000 From research to product: the CMOS MEMS case

Henry Baltes

Proceedings Volume 4176, Micromachined Devices and Components VI; (2000) https://doi.org/10.1117/12.395624
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

Three promising methods of technology transfer from university to industry are illustrated by examples from the area of MEMS and microsensors. These methods are, in order of priority, the foundation of spin-off companies, the infiltration of companies by know-how carriers moving from university to industry, and joint research projects. Examples include micromachined CMOS infrared and chemical sensors and their packaging, the spin-off company SENSIRION and the Venture programs of ETH Zurich. Also mentioned are notorious transfer obstacles and how they may be overcome.

Citation Download Citation

Henry Baltes "From research to product: the CMOS MEMS case", Proc. SPIE 4176, Micromachined Devices and Components VI, (15 August 2000); https://doi.org/10.1117/12.395624

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