UV-LIGA microfabrication and test of an ac-type micropump based on the magnetohydrodynamic (MHD) principle

Khee-Hang Heng; Wanjun Wang; Michael C. Murphy; Kun Lian

doi:10.1117/12.395655

18 August 2000 UV-LIGA microfabrication and test of an ac-type micropump based on the magnetohydrodynamic (MHD) principle

Khee-Hang Heng, Wanjun Wang, Michael C. Murphy, Kun Lian

Author Affiliations +

Proceedings Volume 4177, Microfluidic Devices and Systems III; (2000) https://doi.org/10.1117/12.395655
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

This paper reports on a research effort to design, microfabricate and test an AC-type magnetohydrodynamic (MHD) micropump using UV-LIGA microfabrication. The micropump is driven using the Lorentz force and can be used to deliver electrically conductive fluids. In the AC-type MHD micropump developed in our laboratory, a diffuser/nozzle is integrated with a MHD driving chamber. With a magnetic field supplied by an external permanent magnet, and an AC electrical current supplied across two copper side-walls, the distributed body force generated will produce a pressure difference on the fluid in the pumping chamber. The directional dependence of the flow resistance of the diffuser/nozzle allows for a net output flow in response to the oscillating pressure generated by the sinusoidal current. The major advantage of a MHD-based micropump is that it does not contain any moving parts. It may have potential applications in medicine delivery, and biological or biomedical studies. An AC-driven micropump may be used to improve on the performance obtained in tests of a DC-driven prototype micropump, that showed pumping performance was significantly degraded by bubble generation.

Citation Download Citation

Khee-Hang Heng, Wanjun Wang, Michael C. Murphy, and Kun Lian "UV-LIGA microfabrication and test of an ac-type micropump based on the magnetohydrodynamic (MHD) principle", Proc. SPIE 4177, Microfluidic Devices and Systems III, (18 August 2000); https://doi.org/10.1117/12.395655

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