Novel high-resolution vibration sensor based on laser frequency splitting technology

Yi Zhang; Shulian Zhang

doi:10.1117/12.403845

10 October 2000 Novel high-resolution vibration sensor based on laser frequency splitting technology

Yi Zhang, Shulian Zhang

Proceedings Volume 4222, Process Control and Inspection for Industry; (2000) https://doi.org/10.1117/12.403845
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

The prototype of a novel high resolution vibration sensor based on HeNe laser frequency splitting technology is presented in this paper and the results of a series of experiments are reported. A seismic inertial structure has been developed to realize the absolute measurement. The parameters of the inertial structure can be selected to be suitable for different vibration frequency bands and different sensitivities. In the experiments the highest resolution of 15nm on the measurement of vibration amplitudes are obtained. The sensor has a good potential perspective to be applied in the high-resolution and high- sensitivity, low or middle frequency vibration measurements.

Citation Download Citation

Yi Zhang and Shulian Zhang "Novel high-resolution vibration sensor based on laser frequency splitting technology", Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); https://doi.org/10.1117/12.403845

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