Parallel unstructured grid DSMC for the study of molecular gas dynamics in semiconductor manufacturing

Abhinav Singh; Yong Zhao

doi:10.1117/12.405425

24 October 2000 Parallel unstructured grid DSMC for the study of molecular gas dynamics in semiconductor manufacturing

Abhinav Singh, Yong Zhao

Proceedings Volume 4228, Design, Modeling, and Simulation in Microelectronics; (2000) https://doi.org/10.1117/12.405425
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

This paper describes the implementation aspects of a 2D, unstructured grid based Direct Simulation Monte Carlo flow solver for the study of molecular gas dynamics found in thin film deposition processes. A localized data structure base don domain decomposition is developed to improve the particle/molecule tracking, which is otherwise computationally intensive. The method has been implemented on a massively parallel computing platform for shortened simulation time. Results are validated against known analytical solutions and published results. Furthermore, the influence of parameters, such as sticking coefficient and aspect ratio for step coverage on a 1 micrometers wide trench by sputter deposition was studied. The results show that the step coverage deteriorates with increasing sticking coefficient and aspect ratio.

Citation Download Citation

Abhinav Singh and Yong Zhao "Parallel unstructured grid DSMC for the study of molecular gas dynamics in semiconductor manufacturing", Proc. SPIE 4228, Design, Modeling, and Simulation in Microelectronics, (24 October 2000); https://doi.org/10.1117/12.405425

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