Microfabrication of 32x32 uncooled IR focal plane array

Weiguo Liu; Lingling Sun; Weiguang Zhu; Ooi Kiang Tan

doi:10.1117/12.404914

20 October 2000 Microfabrication of 32x32 uncooled IR focal plane array

Weiguo Liu, Lingling Sun, Weiguang Zhu, Ooi Kiang Tan

Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404914
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

Design and fabrication of a 32 X 32 uncooled IR focal plane array based on Si micromachining technique is presented. Ferroelectric lead zirconate titanate (PZT) thin film was used as the sensing material in the array. The PZT thin film was deposited on the top of Si substrate coated with silicon dioxide, silicon nitrite, titanium and platinum. Sol-gel method was used to deposit the PZT film. Size of the sensing element is 60 X 80 micrometers ² and pixel size is 80 X 100 micrometers ², yields a filling factor of 60%. In order to eliminate the thermal loss from the PZT elements to silicon substrate to improve the response of the IR sensor, silicon substrate under the sensing element was etched off using KOH micromachining technique. Membrane composed of silicon dioxide and silicon nitride was formed. Membrane size as large as 3.2 X 3.8 mm² is fabricated. Results proved that micromachining is an effective way in fabricating uncooled IR focal plane array based on ferroelectric thin films. The process is totally compatible with standard IC fabrication techniques.

Citation Download Citation

Weiguo Liu, Lingling Sun, Weiguang Zhu, and Ooi Kiang Tan "Microfabrication of 32x32 uncooled IR focal plane array", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); https://doi.org/10.1117/12.404914

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available