Submicron structuring of solid targets with femtosecond laser pulses

Frank Korte; Stefan Nolte; Boris N. Chichkov; Carsten Fallnich; Andreas Tuennermann; Herbert Welling

doi:10.1117/12.432502

29 June 2001 Submicron structuring of solid targets with femtosecond laser pulses

Frank Korte, Stefan Nolte, Boris N. Chichkov, Carsten Fallnich, Andreas Tuennermann, Herbert Welling

Proceedings Volume 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI; (2001) https://doi.org/10.1117/12.432502
Event: Photonics West 2001 - LASE, 2001, San Jose, CA, United States

Abstract

Possibilities to fabricate sub-micron structures in thin metal films, metal coatings, and glass substrates using femtosecond laser pulses are systematically studied. Structures are produced by direct femtosecond-pulse laser ablation of solid targets at atmospheric pressure. Tight focusing and imaging techniques are applied. Dependencies of the structure size on laser pulse energy and pulse number are investigated.

Citation Download Citation

Frank Korte, Stefan Nolte, Boris N. Chichkov, Carsten Fallnich, Andreas Tuennermann, and Herbert Welling "Submicron structuring of solid targets with femtosecond laser pulses", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); https://doi.org/10.1117/12.432502

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